Crater-Visible under diffused illumination, a surface imperfection on a wafer that can be distinguished individually. 微坑-在扩散照明下可见的,晶圆片表面可区分的缺陷。
The surface cratered with the constant dropping of water. Pit-A non-removable imperfection found on the surface of a wafer. 表面因长年不断地滴水而成坑凹。深坑-一种晶圆片表面无法消除的缺陷。